====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     3.E+04 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   138.2E+02 A   Straggling =   226.8E+01 A
 Ion Lateral Range =   215.8E+01 A   Straggling =   272.3E+01 A
 Ion Radial  Range =   339.5E+01 A   Straggling =   180.5E+01 A
====================================================================
 Range Skewne- = -000.9569  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 004.0345  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Fe    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
250010.E-03  0.0000E+00  2.9145E+07
500010.E-03  0.0000E+00  3.4097E+07
750010.E-03  0.0000E+00  3.4887E+07
100001.E-02  0.0000E+00  3.7922E+07
125001.E-02  0.0000E+00  3.5161E+07
150001.E-02  0.0000E+00  3.5337E+07
175001.E-02  0.0000E+00  3.8741E+07
200001.E-02  0.0000E+00  3.5394E+07
225001.E-02  0.0000E+00  4.2033E+07
250001.E-02  0.0000E+00  4.3805E+07
275001.E-02  4.0000E+02  4.9753E+07
300001.E-02  4.0000E+02  5.1228E+07
325001.E-02  4.0000E+02  4.5768E+07
350001.E-02  0.0000E+00  5.6277E+07
375001.E-02  4.0000E+02  5.6903E+07
400001.E-02  0.0000E+00  4.7873E+07
425001.E-02  0.0000E+00  4.5831E+07
450001.E-02  0.0000E+00  5.5500E+07
475001.E-02  0.0000E+00  5.9402E+07
500001.E-02  0.0000E+00  5.6820E+07
525001.E-02  0.0000E+00  5.4474E+07
550001.E-02  4.0000E+02  5.9285E+07
575001.E-02  4.0000E+02  6.3361E+07
600001.E-02  1.2000E+03  7.2862E+07
625001.E-02  4.0000E+02  7.5744E+07
650001.E-02  0.0000E+00  8.2541E+07
675001.E-02  4.0000E+02  7.8239E+07
700001.E-02  4.0000E+02  8.2923E+07
725001.E-02  1.2000E+03  9.0940E+07
750001.E-02  4.0000E+02  8.9172E+07
775001.E-02  1.2000E+03  9.6693E+07
800001.E-02  1.2000E+03  9.7386E+07
825001.E-02  0.0000E+00  9.3896E+07
850001.E-02  2.0000E+03  9.6134E+07
875001.E-02  1.2000E+03  1.0540E+08
900001.E-02  3.6000E+03  1.0737E+08
925001.E-02  2.8000E+03  1.0559E+08
950001.E-02  2.0000E+03  1.1524E+08
975001.E-02  3.6000E+03  1.2048E+08
100000.E-01  2.8000E+03  1.2226E+08
102500.E-01  3.6000E+03  1.5147E+08
105000.E-01  3.6000E+03  1.4628E+08
107500.E-01  6.4000E+03  1.4076E+08
110000.E-01  5.2000E+03  1.4386E+08
112500.E-01  5.2000E+03  1.4788E+08
115000.E-01  6.8000E+03  1.5299E+08
117500.E-01  8.8000E+03  1.5550E+08
120000.E-01  6.0000E+03  1.7104E+08
122500.E-01  1.3600E+04  1.7021E+08
125000.E-01  1.0000E+04  1.5543E+08
127500.E-01  9.6000E+03  1.7981E+08
130000.E-01  1.2400E+04  1.7237E+08
132500.E-01  1.6000E+04  1.6739E+08
135000.E-01  1.6800E+04  1.5990E+08
137500.E-01  1.8400E+04  1.5303E+08
140000.E-01  1.6000E+04  1.5024E+08
142500.E-01  2.1200E+04  1.5210E+08
145000.E-01  1.7200E+04  1.5554E+08
147500.E-01  2.1600E+04  1.4321E+08
150000.E-01  1.7200E+04  1.1819E+08
152500.E-01  1.9600E+04  1.2475E+08
155000.E-01  2.5600E+04  1.0698E+08
157500.E-01  1.6400E+04  7.8453E+07
160000.E-01  1.5200E+04  5.9313E+07
162500.E-01  1.9200E+04  5.6116E+07
165000.E-01  1.1200E+04  3.5559E+07
167500.E-01  8.4000E+03  2.4270E+07
170000.E-01  6.0000E+03  1.6144E+07
172500.E-01  6.0000E+03  1.7808E+07
175000.E-01  6.0000E+03  1.0909E+07
177500.E-01  2.0000E+03  4.1834E+06
180000.E-01  1.2000E+03  2.5067E+06
182500.E-01  4.0000E+02  1.0560E+06
185000.E-01  8.0000E+02  8.0641E+05
187500.E-01  0.0000E+00  0.0000E+00
190000.E-01  0.0000E+00  0.0000E+00
192500.E-01  0.0000E+00  0.0000E+00
195000.E-01  0.0000E+00  0.0000E+00
197500.E-01  0.0000E+00  0.0000E+00
200000.E-01  0.0000E+00  0.0000E+00
202500.E-01  0.0000E+00  0.0000E+00
205000.E-01  0.0000E+00  0.0000E+00
207500.E-01  0.0000E+00  0.0000E+00
210000.E-01  0.0000E+00  0.0000E+00
212500.E-01  0.0000E+00  0.0000E+00
215000.E-01  0.0000E+00  0.0000E+00
217500.E-01  0.0000E+00  0.0000E+00
220000.E-01  0.0000E+00  0.0000E+00
222500.E-01  0.0000E+00  0.0000E+00
225000.E-01  0.0000E+00  0.0000E+00
227500.E-01  0.0000E+00  0.0000E+00
230000.E-01  0.0000E+00  0.0000E+00
232500.E-01  0.0000E+00  0.0000E+00
235000.E-01  0.0000E+00  0.0000E+00
237500.E-01  0.0000E+00  0.0000E+00
240000.E-01  0.0000E+00  0.0000E+00
242500.E-01  0.0000E+00  0.0000E+00
245000.E-01  0.0000E+00  0.0000E+00
247500.E-01  0.0000E+00  0.0000E+00
250000.E-01  0.0000E+00  0.0000E+00
